vestiftИзвестия Национальной академии наук Беларуси. Серия физико-технических наукProceedings of the National Academy of Sciences of Belarus. Physical-technical series1561-83582524-244XThe Republican Unitary Enterprise Publishing House "Belaruskaya Navuka"10.29235/1561-8358-2020-65-2-135-144vestift-592Research ArticleМАТЕРИАЛОВЕДЕНИЕ, МЕТАЛЛУРГИЯMATERIALS SCIENCES AND ENGINEERING, METALLURGYВлияние параметров электролитического осаждения на структуру и микромеханические свойства пленок Ni–FeInfluence of electrodeposition parameters on structure and micromechanical properties of thin Ni–Fe filmsФедосюкВ. М.FedosyukV. M.

Федосюк Валерий Михайлович – член-корреспондент Национальной академии наук Беларуси, доктор физико-математических наук, генеральный директор

ул. П. Бровки, 19, 220072, Минск

Valeri M. Fedosyuk – Corresponding Member of the National Academy of Sciences of Belarus, D. Sc. (Physics and Mathematics), General Director

19, P. Brovka Str., 220072, Minsk

fedosyuk@physics.byhttps://orcid.org/0000-0002-2225-9641ЗубарьТ. И.ZubarT. I.

Зубарь Татьяна Игоревна – кандидат физико-математических наук, старший научный сотрудник

ул. П. Бровки, 19, 220072, Минск

Tatiana I. Zubar – Ph. D. (Physics and Mathematics), Senior Researcher

19, P. Brovka Str., 220072, Minsk

tatuana@gmail.comhttps://orcid.org/0000-0003-3430-9578ТрухановА. В.TrukhanovA. V.

Труханов Алексей Валентинович – кандидат физикоматематических наук, ведущий научный сотрудник

ул. П. Бровки, 19, 220072, Минск

Alex V. Trukhanov – Ph. D. (Physics and Mathematics), Leading Researcher

19, P. Brovka Str., 220072, Minsk

truhanov86@mail.ruНаучно-практический центр Национальной академии наук Беларуси по материаловедениюScientific and Practical Materials Research Center of the National Academy of Sciences of Belarus202007072020652135144Copyright © Федосюк В.М., Зубарь Т.И., Труханов А.В., 20202020Федосюк В.М., Зубарь Т.И., Труханов А.В.Fedosyuk V.M., Zubar T.I., Trukhanov A.V.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://vestift.belnauka.by/jour/article/view/592

Проведены исследования корреляции между режимами синтеза, химическим составом, кристаллической структурой и микроструктурой поверхности, а также механическими свойствами тонких наноструктурированных пленок Ni–Fe. Тонкие пленки Ni–Fe были получены в различных режимах электролитического осаждения: в режиме постоянного тока и в импульсных режимах с длительностью импульса 1 с, 10–3 и 10–5 с. Показано, что уменьшение длительности импульса до 10–5 с приводит к увеличению модуля упругости и твердости пленок благодаря малому размеру зерна и, соответственно, большому количеству границ зерен с повышенным сопротивлением пластической деформации. Исследовано влияние термической обработки при T = 100, 200, 300 и 400 °С на микроструктуру поверхности и микромеханические свойства пленок. После термообработки при 400 °С наблюдалось увеличение размера зерна от 6 до 200 нм, что в сочетании с процессами взаимодиффузии материала подслоя и пленки привело к значительному снижению твердости и модуля упругости. Пленки Ni–Fe с улучшенными механическими свойствами могут быть использованы как покрытия корпусов микроэлектроники для электромагнитной их защиты.

The correlation between the synthesis modes, chemical composition, crystal structure, surface microstructure, and also the mechanical properties of thin nanostructured Ni – Fe films has been studied. Thin Ni–Fe films on the Si with Au sublayer were obtained using electrolyte deposition with different current modes: direct current and three pulsed modes with pulse duration of 1 s, 10–3 and 10–5 s. It is shown that a decrease in the pulse duration to 10–5 s leads to an increase in the film elastic modulus and the hardness due to the small grain size and a large number of grain boundaries with increased resistance to plastic deformation. The effect of heat treatment at 100, 200, 300, and 400 °C on the surface microstructure and micromechanical properties of the films was investigated. An increase in grain size from 6 to 200 nm was found after heat treatment at 400 °C which, in combination with interfusion processes of the half-layer material, led to a significant decrease in hardness and elastic modulus. Ni–Fe films with improved mechanical properties can be used as coatings for microelectronic body for their electromagnetic protection.

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The authors declare that there are no conflicts of interest present.