vestiftИзвестия Национальной академии наук Беларуси. Серия физико-технических наукProceedings of the National Academy of Sciences of Belarus. Physical-technical series1561-83582524-244XThe Republican Unitary Enterprise Publishing House "Belaruskaya Navuka"10.29235/1561-8358-2022-67-1-86-93vestift-724Research ArticleРАДИОЭЛЕКТРОНИКА И ПРИБОРОСТРОЕНИЕRADIOELECTRONICS AND INSTRUMENT-MAKINGПогрешность передачи размера единицы длины – метра в нанометровом диапазоне измерений при использовании наноизмерительной машиныThe error of transferring the size of a unit of length – a meter in the nanometer range using the nanomeasuring machineБагдюнА. А.BagdunA. A.

Багдюн Александр Андреевич – ведущий инженер по метрологии – исследователь производственно-исследовательского отдела измерений геометрических величин

Старовиленский тракт, 93, 220053, Минск

Alexandr A. Bagdun – Leading Metrology Engineer – Researcher of the Production and Research Department for Measuring Geometric Quantities

Starovilensky Trakt, 93, 220053, Minsk 

bagdun.ne@gmail.comСоломахоВ. Л.SolomakhoV. L.

Соломахо Владимир Леонтьевич – доктор технических наук, профессор

пр. Независимости, 65, 220213, Минск

Vladimir L. Solomakho – D. Sc. (Engineering), Professor

65, Nezavisimosti Ave., 220013, Minsk 

v.solomakho@gmail.comБелорусский государственный институт метрологииBelarusian State Institute of MetrologyБелорусский национальный технический университетBelarusian National Technical University2022070420226718693Copyright © Багдюн А.А., Соломахо В.Л., 20222022Багдюн А.А., Соломахо В.Л.Bagdun A.A., Solomakho V.L.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://vestift.belnauka.by/jour/article/view/724

Приводится описание принципа измерения линейных размеров с помощью наноизмерительной машины (NMM), реализующей абсолютный интерферометрический метод измерения по трем координатным осям в диапазоне 25X25X5 мм3. Выявлены источники неисключенной систематической погрешности измерений, которые условно разделены на факторы, связанные с методикой измерения длины с помощью интерферометра и факторы, определяемые конструктивными и технологическими особенностями наноизмерительной машины. Установлены статистические оценки результата измерений и рассчитана погрешность передачи размера единицы – длины метра в нанометровом диапазоне измерений. Полученные результаты позволяют утверждать, что наноизмерительная машина – уникальное средство измерения, позволяющее проводить измерения миллиметровых размеров с нанометровой точностью. Полученные результаты могут быть использованы для метрологической оценки мер высоты ступени и ширины шага, при калибровке средств измерений в нанометровом диапазоне, мер шероховатости в большом диапазоне при калибровке профилометров и контурографов, а также шаблонов и объект-микрометров для измерительных микроскопов высокой точности.

The paper describes the principle of measuring linear dimensions using a nano-measuring machine (NMM), which implements the method of measuring three coordinate axes in the range of 25X25X5 mm3. Sources of non-excluded systematic measurement errors are identified, which are conventionally divided into factors associated with the method of measuring length using an interferometer and factors determined by the design and technological features of the nano-measuring machine. Statistical estimates of the measurement result have been determined and the error in transferring the size – meter length in the nanometer range of measurements has been calculated. The results obtained assert that the nano-measuring machine is a unique tool that allows one to carry out measurements of millimeter dimensions with nanometer accuracy. The results obtained can be used for metrological assessment of the step height and step width, when calibrating measuring instruments in the nanometer range, roughness measures in a large range when calibrating profilometers and contourographs, as well as templates and micrometer objects for measuring high-precision microscopes.

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The authors declare that there are no conflicts of interest present.