vestiftИзвестия Национальной академии наук Беларуси. Серия физико-технических наукProceedings of the National Academy of Sciences of Belarus. Physical-technical series1561-83582524-244XThe Republican Unitary Enterprise Publishing House "Belaruskaya Navuka"10.29235/1561-8358-2023-68-4-271-279vestift-816Research ArticleМАТЕРИАЛОВЕДЕНИЕ, МЕТАЛЛУРГИЯMATERIALS SCIENCES AND ENGINEERING, METALLURGYОпределение вязкости разрушения алмазоподобных тонких покрытий на мягком и твердом подслоях методом наноиндентированияDetermination of fracture toughness of the thin diamond-like coatings by nanoindentationhttps://orcid.org/0000-0002-3245-5945ЛапицкаяВ. А.LapitskayaV. A.

Лапицкая Василина Александровна – кандидат технических наук, старший научный сотрудник.

Ул. Ф. Скорины, 36, 220141, Минск

Vasilina A. Lapitskaya – Cand. Sci. (Engineering), Senior Researcher.

15, P. Brovka Str., 220072, Minsk

vasilinka.92@mail.ruhttps://orcid.org/0000-0002-3993-3559КузнецоваТ. А.KuznetsovaT. A.

Кузнецова Татьяна Анатольевна – кандидат технических наук, доцент, заместитель заведующего лабораторией нанопроцессов и технологий.

Ул. Ф. Скорины, 36, 220141, Минск

Tatyana A. Kuznetsova – Cand. Sci. (Engineering), Associate Professor, Deputy Head of the Laboratory.

15, P. Brovka Str., 220072, Minsk

kuzn06@mail.ruhttps://orcid.org/0000-0002-5301-0195ЧижикС. А.ChizhikS. A.

Чижик Сергей Антонович – академик Национальной академии наук Беларуси, доктор технических наук, профессор, заведующий лабораторией нанопроцессов и технологий.

Ул. Ф. Скорины, 36, 220141, Минск

Sergei A. Chizhik – Academician of the National Academy of Sciences of Belarus, Dr. Sci. (Engineering), Professor, Chief.

15, P. Brovka Str., 220072, Minsk

chizhik@presidium.bas-net.byhttps://orcid.org/0000-0003-4993-0519РогачёвА. А.RogachevA. A.

Рогачёв Александр Александрович – член-корреспондент Национальной академии наук Беларуси, доктор технических наук, профессор, директор.

Ул. Ф. Скорины, 36, 220141, Минск

Alexander A. Rogachev – Corresponding Member of the National Academy of Sciences of Belarus, Dr. Sci. (Engineering), Professor, Director.

36, F. Skaryna Str., 220141, Minsk

rogachev78@mail.ruИнститут тепло- и массообмена имени А.В. Лыкова Национальной академии наук БеларусиA.V. Luikov Heat and Mass Transfer Institute of the National Academy of Sciences of BelarusИнститут химии новых материалов Национальной академии наук БеларусиInstitute of Chemistry of New Materials of the National Academy of Sciences of Belarus202308012024684271279Copyright © Лапицкая В.А., Кузнецова Т.А., Чижик С.А., Рогачёв А.А., 20242024Лапицкая В.А., Кузнецова Т.А., Чижик С.А., Рогачёв А.А.Lapitskaya V.A., Kuznetsova T.A., Chizhik S.A., Rogachev A.A.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://vestift.belnauka.by/jour/article/view/816

Представлены результаты исследования структуры, физико-механических свойств обладающих высокой твердостью, но в то же время склонностью к расслоению и разрушению из-за высоких остаточных внутренних напряжений алмазоподобных покрытий (АПП) на подслоях различной твердости. Вязкость разрушения определяли методом наноиндентирования и энергетическим методом расчета с использованием кривых подвода-отвода. Для исследования структуры поверхности и области деформации после наноиндентирования использовали атомносиловую микроскопию. Установлено изменение структуры поверхности и шероховатости АПП в зависимости от подслоя. Низкая шероховатость характерна для АПП на медном подслое. Нанесение титанового подслоя приводит к повышению модуля упругости АПП. Микротвердость у обоих покрытий практически одинаковая. АСМ-исследования показали два различных типа деформации АПП после наноиндентирования пирамидой Берковича. Трещина на покрытиях с медным подслоем распространяется вокруг отпечатка индентирования, а на АПП с титановым подслоем – вдоль граней отпечатка. Установлено, что вязкость разрушения у АПП на титановом подслое на 33 % ниже по сравнению с АПП на медном подслое за счет уменьшения релаксации напряжений внутри покрытия. Рассмотренные покрытия воз можно применять в микроэлектронике для защиты от механических повреждений контактирующих и трущихся поверхностей.

The results of a study of the structure and physical and mechanical properties of diamond-like coatings (DLC) on sublayers of different hardness are presented. The coatings have high hardness, but at the same time they are prone to delamination and destruction due to high residual internal stresses. The fracture toughness was determined by the nanoindentation method and the energy calculation method using approach-retraction curves. Atomic force microscopy was used to study the surface structure and deformation region after nanoindentation. A change in the surface structure and roughness of DLC was established depending on the sublayer. Low roughness is characteristic of DLC on a copper sublayer. Applying а titanium sublayer leads to an increase in the elastic modulus of the DLC. The microhardness of both coatings is practically the same. AFM studies have shown two different types of DLC deformation after nanoindentation with a Berkovich pyramid. A crack on coatings with a copper sublayer propagates around the indentation print, and on an DLC with a titanium sublayer, it propagates along the edges of the indentation. It was found that the fracture toughness of DLC on a Ti sublayer is 33 % lower compared to DLC on a Cu sublayer due to a decrease in stress relaxation inside the coating. The considered coatings can be used in microelectronics for protection against mechanical damage on contacting and rubbing surfaces.

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The authors declare that there are no conflicts of interest present.