vestiftИзвестия Национальной академии наук Беларуси. Серия физико-технических наукProceedings of the National Academy of Sciences of Belarus. Physical-technical series1561-83582524-244XThe Republican Unitary Enterprise Publishing House "Belaruskaya Navuka"10.29235/1561-8358-2024-69-3-183-189vestift-848Research ArticleМАТЕРИАЛОВЕДЕНИЕ, МЕТАЛЛУРГИЯMATERIALS SCIENCES AND ENGINEERING, METALLURGYФторсодержащие покрытия алмазоподобного углеродаFluorine containing diamond-like carbon coatingshttps://orcid.org/0009-0003-6929-8335АкулаИ. П.AkulaI. P.

Акула Игорь Петрович – кандидат технических наук, ведущий научный сотрудник

ул. Академика Купревича, 10, 220084, Минск

Igor P. Akula – Cand. Sci. (Engineering), Leading Researcher

10, Kuprevich Str., 220141, Minsk

shark@phti.byЗалесскийВ. Г.ZalesskiV. G.

Залесский Виталий Геннадьевич – доктор физико-математических наук, директор

ул. Академика Купревича, 10, 220084, Минск

Vitali G. Zalesski – Dr. Sci. (Physics and Mathematics), Director

10, Kuprevich Str., 220141, Minsk

v.zalesski@phti.byЧеканН. М.ChekanN. M.

Чекан Николай Михайлович – кандидат физико-математических наук, заведующий лабораторией наноматериалов и ионно-плазменных процессов

ул. Академика Купревича, 10, 220084, Минск

Nikolai M. Chekan – Cand. Sci. (Physics and Mathematics), Head of the Laboratory of Nanomaterials and Ion-Plasma Processes

10, Kuprevich Str., 220141, Minsk

chekan@phti.byОвчинниковЕ. В.OvchinnikovE. V.

Овчинников Евгений Витальевич – доктор технических наук, профессор кафедры машиноведения и технической эксплуатации автомобилей

ул. Ожешко 22, 230023, Гродно

Evgeniy V. Ovchinnikov – Dr. Sci. (Engineering), Professor of the Department of Mechanical Science and Technical Operation of Automobiles

22, Ozheshko Str., 230023, Grodno

ovchin@grsu.byФизико-технический институт Национальной академии наук БеларусиPhysical-Technical Institute of the National Academy of Sciences of BelarusГродненский государственный университет имени Янки КупалыYanka Kupala State University of Grodno202406102024693183193Copyright © Акула И.П., Залесский В.Г., Чекан Н.М., Овчинников Е.В., 20242024Акула И.П., Залесский В.Г., Чекан Н.М., Овчинников Е.В.Akula I.P., Zalesski V.G., Chekan N.M., Ovchinnikov E.V.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://vestift.belnauka.by/jour/article/view/848

Получены фторсодержащие покрытия алмазоподобного углерода (DLC, от англ. diamondlike carbon) методом CVD осаждения с использованием деструкции газообразных углеводородов высокоэнергетическим ионным источником с анодным слоем. Исследован химический состав, структура, поверхностная энергия, механотрибологические характеристики синтезированного тонкопленочного материала. Показано, что содержание фтора в осажденных покрытиях достигает 31 ат.%. Установлено, что присутствие фтора в покрытии DLC способствует формированию нанодисперсных графитоподобных структур. Фторсодержащие покрытия с большим содержанием sp2 -гибридизированных атомов углерода и фрагментов графита демонстрируют снижение твердости. Такие покрытия обладают очень низким коэффициентом трения на уровне 0,03–0,07 в силу малого значения поверхностной энергии, которая может быть снижена в 1,5 раза по сравнению с беспримесным DLC. Установлено, что различные содержания фтора в тонкопленочном материале алмазоподобного углерода по-разному сказываются на взаимодействии покрытия DLC с полярными/неполярными диэлектриками. Результаты исследований могут быть использованы для технологии получения твердосмазочных материалов в узлах трения машин и механизмов, а также представляют интерес для медицины, пищевой промышленности, производства пластмасс, химических волокон в качестве химически инертных и коррозионностойких покрытий.

Fluorine containing diamond-like carbon (DLC) coatings were obtained by CVD deposition using the destruction of gaseous hydrocarbons by a high-energy ion source with an anode layer. The chemical composition, structure, surface energy, mechano-tribological characteristics of the synthesized thin-film material were studied. It has been shown that the fluorine content in the deposited coatings reaches 31 at.%. It has been established that the presence of fluorine in the DLC coating promotes the formation of nanodispersed graphite-like structures. Fluorine containing coatings with a high content of sp2 hybridized carbon atoms and graphite fragments show a decrease in hardness. Such coatings have a very low coefficient of friction at the level of 0.03–0.07 due to the low surface energy, which can be reduced by 1.5 times compared to pure DLC. It has been established that different fluorine contents in thin-film diamond-like carbon material have different effects on the interaction of the DLC coating with polar/non-polar dielectrics. The research results can be used for the technology of producing solid lubricants in friction units of machines and mechanisms, and are also of interest for medicine, the food industry, the production of plastics, and chemical fibers as chemically inert and corrosion-resistant coatings.

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The authors declare that there are no conflicts of interest present.