vestiftИзвестия Национальной академии наук Беларуси. Серия физико-технических наукProceedings of the National Academy of Sciences of Belarus. Physical-technical series1561-83582524-244XThe Republican Unitary Enterprise Publishing House "Belaruskaya Navuka"10.29235/1561-8358-2025-70-3-185-197vestift-904Research ArticleСтатьиВлияние напряжения смещения на подложке на морфологию и свойства покрытий ZrN, нанесенных методом магнетронного распыления (на англ. яз.)The influence of substrate bias voltage on the morphology and properties of ZrN coatings deposited by magnetron sputteringhttps://orcid.org/0000-0001-5331-8539ВархолинскиБ.WarcholinskiB.

Вархолински Богдан – доктор технических наук, доцент факультета машиностроения и энергетики

ул. Снядецких, 2, Кошалин, 75-453

Bogdan Warcholinski – Dr. Sci. (Engineering), Associate Professor at Faculty of Mechanical and Energy Engineering

2, Sniadeckich St., Koszalin, 75-453

b.warcholinski@pya.org.plhttps://orcid.org/0000-0002-3993-3559КузнецоваТ. А.KuznetsovaT. A.

Кузнецова Татьяна Анатольевна – кандидат технических наук, доцент

ул. П. Бровки, 15, 220072, Минск

Tatyana A. Kuznetsova – Cand. Sci. (Engineering), Associate Professor

15, P. Brovka St., 220072, Minsk

https://orcid.org/0000-0002-3245-5945ЛапицкаяВ. А.LapitskayaV. A.

Лапицкая Василина Александровна – кандидат технических наук, доцент, заместитель заведующего лабораторией нанопроцессов и технологий

ул. П. Бровки, 15, 220072, Минск

Vasilina A. Lapitskaya – Cand. Sci. (Engineering), Associate Professor, Deputy Head of the Laboratory of Nanoprocesses andTechnologies

15, P. Brovka St., 220072, Minsk

vasilinka.92@mail.ruhttps://orcid.org/0000-0002-8780-7717ХабароваА. В.KhabarovaA. V.

Хабарова Анастасия Викторовна – младший научный сотрудник

ул. П. Бровки, 15, 220072, Минск

Anastasiya V. Khabarova – Junior Researcher

15, P. Brovka St., 220072, Minsk

av.khabarova@mail.ruhttps://orcid.org/0000-0002-5301-0195ЧижикС. А.ChizhikS. A.

Чижик Сергей Антонович – академик Национальной академии наук Беларуси, доктор технических наук, профессор, главный научный сотрудник лаборатории нанопроцессов и технологий

ул. П. Бровки, 15, 220072, Минск

Sergei A. Chizhik – Academician of the National Academy of Sciences of Belarus, Dr. Sci. (Engineering), Professor, Chief Researcher of the Laboratory of Nanoprocesses and Technologies

15, P. Brovka St., 220072, Minsk

chizhik_sa@tut.byhttps://orcid.org/0000-0003-4061-4333ГилевичА.GilewiczA.

Гилевич Адам – доктор технических наук, профессор, научный сотрудник факультета машиностроения и энергетики

ул. Снядецких, 2, Кошалин, 75-453

Adam Gilewicz – Dr. Sci. (Engineering), Professor, Researcher at Faculty of Mechanical and Energy Engineering

2, Sniadeckich St., Koszalin, 75-453

adam.gilewicz@tu.koszalin.plГамзелеваТ. В.HamzelevaT. V.

Гамзелева Татьяна Вадимовна – научный сотрудник лаборатории электронно-зондового анализа

ул. Платонова, 41, 220005, Минск

Tatsiana V. Hamzeleva – Researcher of the Laboratory of Electron Probe Analysis

41, Platonov St., 220005, Minsk

iscentr@tut.byКошалинский технологический университетKoszalin University of TechnologyИнститут тепло- и массообмена имени А. В. Лыкова Национальной академии наук БеларусиA. V. Luikov Heat and Mass Transfer Institute of the National Academy of Sciences of BelarusИнститут порошковой металлургии имени академика О. В. РоманаO. V. Roman Powder Metallurgy Institute of the National Academy of Sciences of Belarus202514102025703185197Copyright © Вархолински Б., Кузнецова Т.А., Лапицкая В.А., Хабарова А.В., Чижик С.А., Гилевич А., Гамзелева Т.В., 20252025Вархолински Б., Кузнецова Т.А., Лапицкая В.А., Хабарова А.В., Чижик С.А., Гилевич А., Гамзелева Т.В.Warcholinski B., Kuznetsova T.A., Lapitskaya V.A., Khabarova A.V., Chizhik S.A., Gilewicz A., Hamzeleva T.V.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://vestift.belnauka.by/jour/article/view/904

Напряжение смещения подложки (UB) играет важную роль в процессах формирования покрытий методом физического осаждения из паровой фазы и влияет на морфологию покрытий, их физические свойства, микротвердость, модуль упругости, напряжения, а также на структуру и фазовый состав, микроструктуру и плотность. Для определения характеристик покрытий ZrN, сформированных магнетронным распылением при напряжении смещения подложки от –10 В до –100 В, в ходе исследования использовались рентгеновская дифракция (фазовый состав), сканирующая электронная и атомно-силовая микроскопия (морфология поверхности и распределение макрочастиц на поверхности покрытия, трибологические свойства), а также наноиндентирование (микротвердость и модуль упругости). При росте отрицательного напряжения смещения подложки наблюдалось увеличение интенсивности дифракционных линий ZrN (200), (220) и (222) относительно линии ZrN (111). Шероховатость покрытий уменьшалась с ростом отрицательного напряжения смещения подложки. Самое высокое значение микротвердости (30,6 ГПа) отмечалось для покрытий, сформированных при UB = –50 В. В свою очередь низкую износостойкость по- казало покрытие, осажденное при –100 В, что связано с низким коэффициентом H/E, показывающим низкое упругое поведение покрытия при нагрузке. На покрытии с высокой износостойкостью, осажденном при –10 В, выполнены дополнительные трибологические испытания (от 10 до 50) при различных скоростях (1,99–8,00 мкм/с) и нагрузке (от 8 до 27 мкН). Полученные результаты можно применять при разработке износостойких покрытий для узлов трения различных устройств в машино- и приборостроении, энергетике и транспорте.м

The substrate bias voltage (UB) plays an important role in the coating formation processes using the Physical Vapor Deposition method and affects the morphology of the coatings as well as their physical properties, microhardness, elastic modulus, stresses, as well as the structure and phase composition, microstructure or density. To characterize ZrN coatings formed by magnetron sputtering at substrate bias voltages from –10 V to –100 V, X-ray diffraction (phase composition), scanning electron- and atomic force microscopy (for surface morphology and distribution of macroparticles on the coating surface, tribological properties), and nanoindentation (for microhardness and elastic modulus) were used in the study. With the increase in the negative substrate bias voltage, an increase in the intensity of the ZrN (200), (220) and (222) diffraction lines was observed relative to the ZrN (111) line. The roughness of the coatings decreased with the increase in the negative substrate bias voltage. The highest microhardness, 30.6 GPa, was measured for coatings formed at UB = –50 V. The coating deposited at –100 V showed low wear resistance (due to the low H/E coefficient, showing low elastic behavior of the coating under load). Multi-cycle tribotests were additionally performed on the coating that were deposited at –10 V and showed high wear resistance , with changes in speed (1.99–8.00 μm/s), number of cycles (from 10 to 50) and load (from 8 to 27 μN). The obtained results can be used in developing wear-resistant coatings for friction units of various devices in mechanical engineering and instrument making, power engineering, and transport.

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The authors declare that there are no conflicts of interest present.