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<article article-type="research-article" dtd-version="1.3" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xml:lang="ru"><front><journal-meta><journal-id journal-id-type="publisher-id">vestift</journal-id><journal-title-group><journal-title xml:lang="ru">Известия Национальной академии наук Беларуси. Серия физико-технических наук</journal-title><trans-title-group xml:lang="en"><trans-title>Proceedings of the National Academy of Sciences of Belarus. Physical-technical series</trans-title></trans-title-group></journal-title-group><issn pub-type="ppub">1561-8358</issn><issn pub-type="epub">2524-244X</issn><publisher><publisher-name>The Republican Unitary Enterprise Publishing House "Belaruskaya Navuka"</publisher-name></publisher></journal-meta><article-meta><article-id pub-id-type="doi">10.29235/1561-8358-2025-70-3-219-229</article-id><article-id custom-type="elpub" pub-id-type="custom">vestift-907</article-id><article-categories><subj-group subj-group-type="heading"><subject>Research Article</subject></subj-group><subj-group subj-group-type="section-heading" xml:lang="ru"><subject>Статьи</subject></subj-group></article-categories><title-group><article-title>Структурно-морфологические особенности однокомпонентных и композиционных покрытий на основе полиэтилена, осажденных из активной газовой фазы</article-title><trans-title-group xml:lang="en"><trans-title>Structural and morphological features of single-component and composite polyethylene-based coatings deposited from active gas phase</trans-title></trans-title-group></title-group><contrib-group><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Горбачев</surname><given-names>Д. Л.</given-names></name><name name-style="western" xml:lang="en"><surname>Gorbachev</surname><given-names>D. L.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Горбачев Дмитрий Леонидович – научный  сотрудник  научно-исследовательского  сектор</p><p>ул. Советская, 104, 246028, Гомель</p></bio><bio xml:lang="en"><p>Dmitry L. Gorbachev – Researcher, Research Department </p><p>104, Sovetskaya St., 246028, Gomel</p></bio><email xlink:type="simple">gorbachyov@gsu.by</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Ярмоленко</surname><given-names>М. А.</given-names></name><name name-style="western" xml:lang="en"><surname>Yarmolenko</surname><given-names>M. A.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Ярмоленко Максим Анатольевич – доктор технических наук, профессор, главный научный сотрудник научно-исследовательского сектора </p><p>ул. Советская, 104, 246028, Гомель</p></bio><bio xml:lang="en"><p>Maxim A. Yarmolenko – Dr. Sci. (Engineering), Professor, Chief Researcher of the Research Department </p><p>104, Sovetskaya St., 246028, Gomel</p></bio><email xlink:type="simple">simmak79@mail.ru</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><contrib-id contrib-id-type="orcid">https://orcid.org/0000-0003-4993-0519</contrib-id><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Рогачев</surname><given-names>А. А.</given-names></name><name name-style="western" xml:lang="en"><surname>Rogachev</surname><given-names>A. A.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Рогачев Александр Александрович – член-корреспондент  Национальной  академии  наук  Беларуси,  доктор технических наук, профессор, директор </p><p>ул. Ф. Скорины, 36, 220084, Минск</p></bio><bio xml:lang="en"><p>Alexander A. Rogachev – Corresponding Member of the National Academy of Sciences of Belarus, Dr. Sci. (Engineering), Professor, Director</p><p>36, F. Skaryna St., 220084, Minsk</p></bio><email xlink:type="simple">rogachev@ichnm.by</email><xref ref-type="aff" rid="aff-2"/></contrib></contrib-group><aff-alternatives id="aff-1"><aff xml:lang="ru"><institution>Гомельский государственный университет имени Франциска Скорины</institution></aff><aff xml:lang="en"><institution>Francisk Skorina Gomel State University</institution></aff></aff-alternatives><aff-alternatives id="aff-2"><aff xml:lang="ru"><institution>Институт химии новых материалов Национальной академии наук Беларуси</institution></aff><aff xml:lang="en"><institution>Institute of Chemistry of New Materials of the National Academy of Sciences of Belarus</institution></aff></aff-alternatives><pub-date pub-type="collection"><year>2025</year></pub-date><pub-date pub-type="epub"><day>14</day><month>10</month><year>2025</year></pub-date><volume>70</volume><issue>3</issue><fpage>219</fpage><lpage>229</lpage><permissions><copyright-statement>Copyright &amp;#x00A9; Горбачев Д.Л., Ярмоленко М.А., Рогачев А.А., 2025</copyright-statement><copyright-year>2025</copyright-year><copyright-holder xml:lang="ru">Горбачев Д.Л., Ярмоленко М.А., Рогачев А.А.</copyright-holder><copyright-holder xml:lang="en">Gorbachev D.L., Yarmolenko M.A., Rogachev A.A.</copyright-holder><license xml:lang="ru" license-type="creative-commons-attribution" xlink:href="https://creativecommons.org/licenses/by/4.0/" xlink:type="simple"><license-p>Данная работа распространяется под лицензией Creative Commons Attribution 4.0.</license-p></license><license xml:lang="en" license-type="creative-commons-attribution" xlink:href="https://creativecommons.org/licenses/by/4.0/" xlink:type="simple"><license-p>This work is licensed under a Creative Commons Attribution 4.0 License.</license-p></license></permissions><self-uri xlink:href="https://vestift.belnauka.by/jour/article/view/907">https://vestift.belnauka.by/jour/article/view/907</self-uri><abstract><p>Методом атомно-силовой, инфракрасной спектроскопии определены морфология и молекулярная структура наноразмерных покрытий, осажденных из летучих продуктов электронно-лучевого диспергирования полиэтилена и его смеси с хлоридом алюминия в условиях лазерного ассистирования и без него. Покрытия осаждались на подложки кремния, модифицированные с целью изменения поверхностной энергии. Установлено, что при диспергировании однокомпонентной мишени полиэтилена снижение поверхностной энергии сопровождается монотонным уменьшением шероховатости, среднего размера зерна, повышением фрактальной размерности структурных образований. Покрытия, осажденные из продуктов диспергирования полиэтилена и хлорида алюминия, характеризуются значительно меньшей шероховатостью, меньшим объемом зерна в сравнении с покрытиями, осажденными при диспергировании однокомпонентной мишени, и их структурно-морфологические параметры не коррелируют с изменением поверхностной энергии. Установлено, что лазерное ассистирование электронно-лучевого диспергирования незначительно влияет на молекулярную структуру покрытий. Использование данных слоев в силу их антифрикционных и гидрофобных свойств перспективно в устройствах микроэлектроники и микрофлюидики.</p></abstract><trans-abstract xml:lang="en"><p>Atomic force microscopy and infrared spectroscopy were used to investigate the morphology and molecular structure of nanoscale coatings deposited from volatile products of electron-beam dispersion (EBD) of polyethylene (PE) and its mixture with aluminum chloride, both with and without laser assistance. The coatings were deposited onto silicon substrates modified to vary surface energy. It was found that in the case of single-component PE targets, decreasing surface energy leads to a monotonic reduction in surface roughness and average grain size, as well as an increase in the fractal dimension of structural formations. Coatings obtained from the dispersion products of PE + AlCl3 mixtures exhibit significantly lower roughness and smaller grain volumes compared to those formed from single-component targets. However, their structural and morphological parameters do not correlate with the substrate’s surface energy. Laser stimulation during electron-beam dispersion has a minor effect on the molecular structure of the coatings. Using of these layers due to their antifriction and hydrophobic properties is promising in microelectronics and microfluidics devices.</p></trans-abstract><kwd-group xml:lang="ru"><kwd>электронно-лучевое  диспергирование</kwd><kwd>лазерное  ассистирование</kwd><kwd>покрытия  полиэтилена</kwd><kwd>морфология</kwd><kwd>атомно-силовая микроскопия</kwd></kwd-group><kwd-group xml:lang="en"><kwd>electron-beam dispersion</kwd><kwd>laser assistance</kwd><kwd>polyethylene coatings</kwd><kwd>morphology</kwd><kwd>atomic force microscopy</kwd></kwd-group><funding-group><funding-statement xml:lang="ru">работа выполнена в рамках Государственной программы научных исследований «Химические процессы, реагенты и технологии, биорегуляторы и биооргхимия» на 2021–2025 годы, подпрограмма «Лесохимия-2» комплексного задания 2.4.2.</funding-statement><funding-statement xml:lang="en">this work was carried out within the framework of the State Scientific Research Program “Chemical Processes, Reagents and Technologies, Bioregulators and Bioorganic Chemistry” for 2021–2025, subprograms “Forest Chemistry-2” of the complex task 2.4.2.</funding-statement></funding-group></article-meta></front><back><ref-list><title>References</title><ref id="cit1"><label>1</label><citation-alternatives><mixed-citation xml:lang="ru">Кутепов, А. 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