Energy characteristics of cathodic arc erosion plasma at synthesis of diamond-like carbon coatings
Abstract
A cathode arc carbon plasma in a vacuum as well as in an atmosphere of acetylene at a pressure of 0.2 to 2.0 Pa during the deposition of diamond-like carbon coatings is considered. Pulse-periodic plasma fluxes are generated as a result of graphite cathode sputtering in a four-electrode arc system with self-recovering thin-film conductor of ignition device. With the use of Langmuir probes it was found that the substrate is under accelerating floating potential of - (15-35) V. The electron energy distribution function was found to be Maxwellian one with electron temperature of about 50 eV. Velocity of the most high-energy electrons of plasma flux exceeds 30 km/s while the velocity of directional motion of plasma amounts to 20 km/s in vacuum and 8 km/s in acetylene gas. So when applying a pulsed arc in acetylene atmosphere the noticeable decrease of carbon ions energy from 30 down to 4 eV is observed in comparison with a vacuum cathodic arc.
About the Authors
I. P. Smyaglikov
Physical Technical Institute of the National Academy of Sciences of Belarus
Belarus
Belarus
S. O. Selifanov
Physical Technical Institute of the National Academy of Sciences of Belarus
Belarus
Belarus
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